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Specific Process Knowledge/Thermal Process/Dope with Phosphorus: Difference between revisions

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! width="120" | Thinkness [nm]
! width="120" | Thinkness [nm]
! width="120" | Refrative index
! width="120" | Refrative index
! width="120" | Sheet  
! width="120" | Sheet resistance [Ω]
! width="120" | Slice
! width="120" | Slice Resistivity []
|-
|-
! 3  
! 3  
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