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Specific Process Knowledge/Thermal Process/Dope with Phosphorus: Difference between revisions

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To study the coherence between the temperature and time for doping with phosphorus in DTU-Danchip Phosphorus Predep furnace (A4).  
To study the coherence between the temperature of the Predep and dive-in for doping with phosphorus in DTU-Danchip Phosphorus Predep furnace (A4).  


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'''
====Study setup====
====Study setup====
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'''
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