Specific Process Knowledge/Thermal Process/Dope with Phosphorus: Difference between revisions
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==Test of Phosphorus Predep furnace== | |||
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====Purpose==== | |||
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To study the coherence between the temperature and time for doping with phosphorus in DTU-Danchip Phosphorus Predep furnace (A4). | |||
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====Study setup==== | |||
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