Specific Process Knowledge/Etch/DRIE-Pegasus/processA: Difference between revisions
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=== Results: Etched depths in trenches of different widths === | === Results: Etched depths in trenches of different widths === | ||
<gallery caption="Graphs" widths=" | <gallery caption="Graphs" widths="400" heights="300" perrow="3"> | ||
image:PegProcessA110cycles.jpg| Process time 10:05 | image:PegProcessA110cycles.jpg| Process time 10:05 | ||
image:PegProcessA55cycles.jpg| Process time 20:10 | image:PegProcessA55cycles.jpg| Process time 20:10 | ||
</gallery> | </gallery> | ||