Specific Process Knowledge/Thin film deposition/Furnace LPCVD TEOS: Difference between revisions
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==Process Knowledge== | ==Process Knowledge== | ||
Please take a look at the process side for deposition of TEOS oxide: | Please take a look at the process side for deposition of TEOS oxide: | ||
[[Specific Process Knowledge/Thin film deposition/Deposition of TEOS/Deposition of TEOS using LPCVD|Deposition of TEOS using LPCVD]] | [[Specific Process Knowledge/Thin film deposition/Deposition of TEOS/Deposition of TEOS using LPCVD|Deposition of TEOS using LPCVD]] | ||
==Overview of the performance of the LPCVD TEOS furnace and some process related parameters== | ==Overview of the performance of the LPCVD TEOS furnace and some process related parameters== | ||