Specific Process Knowledge/Thermal Process/A4 Phosphor Pre-dep furnace: Difference between revisions

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 |style="background:WhiteSmoke; color:black"|
 *Silicon wafers (new from the box or RCA cleaned)
-*In doubt: look at the cross contamination sheet or ask one from the furnace team
+*In doubt: look at the [http://www.labmanager.danchip.dtu.dk/view_binary.php?fileId=1250 cross contamination chart] or please send a mail to [mailto:furnace@danchip.dtu.dk furnace@danchip.dtu.dk]
 |-
-| style="background:LightGrey; color:black"|Material NOT allowed
-|style="background:WhiteSmoke; color:black"|
-*wafers must NOT have been exposed to metal prior to A4
-*wafers must NOT have been stored in dirty boxes (i.e. boxes that has contained wafers with metal)
-|-
 |}