Specific Process Knowledge/Thermal Process/Dope with Phosphorus: Difference between revisions
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Revision as of 15:47, 22 February 2013
The furnace A4 phosphorus predep(N-predep) can be used to predeposit silicon wafers with phosphor. The silicon wafers are positioned in a quarts boat. Phosphor is predeposited in the silicon wafers.
In preparation
