Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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== Process information == | == Process information == | ||
'''Process notation''' | |||
Describing a process recipe on the Pegasus may sometimes be difficult because of the great flexibility of the instrument. A compact and precise notation is therefore required for the recipes. Click [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Notation|here]] to find a short description of the official SPTS notation. | Describing a process recipe on the Pegasus may sometimes be difficult because of the great flexibility of the instrument. A compact and precise notation is therefore required for the recipes. Click [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Notation|here]] to find a short description of the official SPTS notation. | ||
'''Standard recipes''' | |||
== The standard processes: Processes A, B, C, D and SOI == | == The standard processes: Processes A, B, C, D and SOI == | ||