Specific Process Knowledge/Thermal Process/Furnace APOX

D1 Furnace Apox

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D1 Furnace Apox: positioned in cleanroom ?

D1 Furnace Apox is a Tempress horizontal furnace for oxidation silicon wafers. This furnace is dedicated production of apox wafers which is a very thick thermal oxide grown at 1150 ^oC. Running a batch of apox wafers (oxide>5µm) can take several weeks.

This furnace is positioned in III-V cleanroom. The furnaces are the cleanest process chambers in the cleanroom. Only new wafers from the box enters this furnace. Check the cross contamination chart. If you are in doubt, please ask one from the furnace team.

Process knowledge

• Oxidation: look at the Oxidation page

Overview of the performance of Apox furnace and some process related parameters

Purpose	Oxidation and annealing	Oxidation: Wet: with bubbler (water steam + N$_{2}$)
Performance	Film thickness	Wet SiO2: used for layer thickness >5µm
Process parameter range	Process Temperature	1150 oC
	Process pressure	1 atm
	Gas flows	N$_{2}$:? sccm
Substrates	Batch size	1-200 4" wafer (or 2" wafers) per run
	Substrate material allowed	Silicon wafers (new from the box)