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Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions

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Bureaucrats, danchip, Administrators
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Jml (talk | contribs)
Bureaucrats, danchip, Administrators
1,918 edits
Line 61: Line 61:
! Process A
! Process A
| Bosch  
| Bosch  
! width="120" | Fast etch   
| width="120" | Fast etch   
! width="120" | Feature
! width="120" | Feature
! width="120" | Mask material
! width="120" | Mask material
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