Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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Until August 2011 processing at the Pegasus was complicated by frequent losses of wafers during transfer operations. It is evident that the instrument is much more susceptible to misalignments of the carousel than expected. A service engineer from SPTS has made a thorough realigning of the instrument that we hope will last a long time. We have therefore introduced a new set of rules that ''all users'' should be taught during a new training session mandatory for all users regardless of prior experience. The rules are: | Until August 2011 processing at the Pegasus was complicated by frequent losses of wafers during transfer operations. It is evident that the instrument is much more susceptible to misalignments of the carousel than expected. A service engineer from SPTS has made a thorough realigning of the instrument that we hope will last a long time. We have therefore introduced a new set of rules that ''all users'' should be taught during a new training session mandatory for all users regardless of prior experience. The rules are: | ||
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# All wafers must be processed using the MACS cassette loader and the automatic mode. The only exceptions are bonded wafers and 150 mm wafers. See point @@@@ | |||
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