Specific Process Knowledge/Lithography/Descum: Difference between revisions
Appearance
No edit summary |
No edit summary |
||
| Line 86: | Line 86: | ||
|} | |} | ||
<br clear="all" /> | <br clear="all" /> | ||
=Decommisioned tools= | =Decommisioned tools= | ||
<span style="color:red">Plasma asher 1 was decommissioned 2024-12-02.</span> | <span style="color:red">Plasma asher 1 was decommissioned 2024-12-02.</span> | ||