Specific Process Knowledge/Lithography/Aligners/MAvsMLA: Difference between revisions
| Line 19: | Line 19: | ||
==AZ 5214E== | ==AZ 5214E== | ||
===Resolution=== | ===Resolution=== | ||
'''Resolution at optimal conditions for different exposure equipment:''' | |||
{| class="wikitable" | {| class="wikitable" | ||
|+ | |+ | ||
| Line 86: | Line 86: | ||
|} | |} | ||
<br clear="all" /> | |||
'''SEM images of different size structures:''' | '''SEM images of different size structures:''' | ||