Specific Process Knowledge/Lithography/Aligners/MAvsMLA: Difference between revisions
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===Resolution=== | ===Resolution=== | ||
* Table with optimal parameters and resolution for different aligners | * Table with optimal parameters and resolution for different aligners | ||
* SEM pictures | |||
===Resist profile (sidewall angle and linewidth)=== | ===Resist profile (sidewall angle and linewidth)=== | ||
*SEM pictures to support graphs? | *SEM pictures to support graphs? | ||