Specific Process Knowledge/Lithography/Aligners/MAvsMLA: Difference between revisions
| Line 16: | Line 16: | ||
==AZ 5214E== | ==AZ 5214E== | ||
===Resolution | ===Resolution and yield=== | ||
* Aligner: Maskless 02 (MLA2) | * Aligner: Maskless 02 (MLA2) | ||
* Aligner: MA6-2 | * Aligner: MA6-2 | ||
* Aligner: MA6-1 | * Aligner: MA6-1 | ||
===Resist profile (sidewall angle and linewidth)=== | ===Resist profile (sidewall angle and linewidth)=== | ||
* Aligner: Maskless 02 (MLA2) | * Aligner: Maskless 02 (MLA2) | ||