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Specific Process Knowledge/Lithography/Aligners/MAvsMLA: Difference between revisions

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Line 20: Line 20:
* Aligner: MA6-2
* Aligner: MA6-2
* Aligner: MA6-1
* Aligner: MA6-1
===Linewidth / Bias===
===Sidewall angle===
* Aligner: Maskless 02 (MLA2)
* Aligner: Maskless 02 (MLA2)
* Aligner: MA6-2
* Aligner: MA6-2
* Aligner: MA6-1
* Aligner: MA6-1
===Sidewall angle===
===Linewidth / Bias===
* Aligner: Maskless 02 (MLA2)
* Aligner: Maskless 02 (MLA2)
* Aligner: MA6-2
* Aligner: MA6-2
Line 31: Line 31:
==AZ MiR 701==
==AZ MiR 701==
===Resolution===
===Resolution===
===Linewidth / Bias===
===Sidewall angle===
* Aligner: Maskless 02 (MLA2)
* Aligner: Maskless 02 (MLA2)
* Aligner: MA6-2
* Aligner: MA6-2
===Sidewall angle===
===Linewidth / Bias===
* Aligner: Maskless 02 (MLA2)
* Aligner: Maskless 02 (MLA2)
* Aligner: MA6-2
* Aligner: MA6-2
Line 40: Line 40:
==AZ nLOF 2020==
==AZ nLOF 2020==
===Resolution===
===Resolution===
===Linewidth / Bias===
===Sidewall angle===
* Aligner: Maskless 01 (MLA1)
* Aligner: Maskless 01 (MLA1)
* Aligner: Maskless 02 (MLA2)
* Aligner: Maskless 02 (MLA2)
* Aligner: MA6-2
* Aligner: MA6-2
===Sidewall angle===
===Linewidth / Bias===
* Aligner: Maskless 01 (MLA1)
* Aligner: Maskless 01 (MLA1)
* Aligner: Maskless 02 (MLA2)
* Aligner: Maskless 02 (MLA2)
* Aligner: MA6-2
* Aligner: MA6-2

Revision as of 12:28, 8 June 2026

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Slides presented at NNUM in Uppsala 2026

MA6 vs MLA 2026_v09

Additional data

THIS PAGE IS UNDER CONSTRUCTION

AZ 5214E

Resolution / Yield

  • Aligner: Maskless 02 (MLA2)
  • Aligner: MA6-2
  • Aligner: MA6-1

Sidewall angle

  • Aligner: Maskless 02 (MLA2)
  • Aligner: MA6-2
  • Aligner: MA6-1

Linewidth / Bias

  • Aligner: Maskless 02 (MLA2)
  • Aligner: MA6-2
  • Aligner: MA6-1

AZ MiR 701

Resolution

Sidewall angle

  • Aligner: Maskless 02 (MLA2)
  • Aligner: MA6-2

Linewidth / Bias

  • Aligner: Maskless 02 (MLA2)
  • Aligner: MA6-2

AZ nLOF 2020

Resolution

Sidewall angle

  • Aligner: Maskless 01 (MLA1)
  • Aligner: Maskless 02 (MLA2)
  • Aligner: MA6-2

Linewidth / Bias

  • Aligner: Maskless 01 (MLA1)
  • Aligner: Maskless 02 (MLA2)
  • Aligner: MA6-2