Specific Process Knowledge/Lithography/Aligners/MAvsMLA: Difference between revisions
Appearance
| Line 20: | Line 20: | ||
* Aligner: MA6-2 | * Aligner: MA6-2 | ||
* Aligner: MA6-1 | * Aligner: MA6-1 | ||
=== | ===Sidewall angle=== | ||
* Aligner: Maskless 02 (MLA2) | * Aligner: Maskless 02 (MLA2) | ||
* Aligner: MA6-2 | * Aligner: MA6-2 | ||
* Aligner: MA6-1 | * Aligner: MA6-1 | ||
=== | ===Linewidth / Bias=== | ||
* Aligner: Maskless 02 (MLA2) | * Aligner: Maskless 02 (MLA2) | ||
* Aligner: MA6-2 | * Aligner: MA6-2 | ||
| Line 31: | Line 31: | ||
==AZ MiR 701== | ==AZ MiR 701== | ||
===Resolution=== | ===Resolution=== | ||
=== | ===Sidewall angle=== | ||
* Aligner: Maskless 02 (MLA2) | * Aligner: Maskless 02 (MLA2) | ||
* Aligner: MA6-2 | * Aligner: MA6-2 | ||
=== | ===Linewidth / Bias=== | ||
* Aligner: Maskless 02 (MLA2) | * Aligner: Maskless 02 (MLA2) | ||
* Aligner: MA6-2 | * Aligner: MA6-2 | ||
| Line 40: | Line 40: | ||
==AZ nLOF 2020== | ==AZ nLOF 2020== | ||
===Resolution=== | ===Resolution=== | ||
=== | ===Sidewall angle=== | ||
* Aligner: Maskless 01 (MLA1) | * Aligner: Maskless 01 (MLA1) | ||
* Aligner: Maskless 02 (MLA2) | * Aligner: Maskless 02 (MLA2) | ||
* Aligner: MA6-2 | * Aligner: MA6-2 | ||
=== | ===Linewidth / Bias=== | ||
* Aligner: Maskless 01 (MLA1) | * Aligner: Maskless 01 (MLA1) | ||
* Aligner: Maskless 02 (MLA2) | * Aligner: Maskless 02 (MLA2) | ||
* Aligner: MA6-2 | * Aligner: MA6-2 | ||
Revision as of 12:28, 8 June 2026
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Slides presented at NNUM in Uppsala 2026
Additional data
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AZ 5214E
Resolution / Yield
- Aligner: Maskless 02 (MLA2)
- Aligner: MA6-2
- Aligner: MA6-1
Sidewall angle
- Aligner: Maskless 02 (MLA2)
- Aligner: MA6-2
- Aligner: MA6-1
Linewidth / Bias
- Aligner: Maskless 02 (MLA2)
- Aligner: MA6-2
- Aligner: MA6-1
AZ MiR 701
Resolution
Sidewall angle
- Aligner: Maskless 02 (MLA2)
- Aligner: MA6-2
Linewidth / Bias
- Aligner: Maskless 02 (MLA2)
- Aligner: MA6-2
AZ nLOF 2020
Resolution
Sidewall angle
- Aligner: Maskless 01 (MLA1)
- Aligner: Maskless 02 (MLA2)
- Aligner: MA6-2
Linewidth / Bias
- Aligner: Maskless 01 (MLA1)
- Aligner: Maskless 02 (MLA2)
- Aligner: MA6-2