Specific Process Knowledge/Lithography/Aligners/MAvsMLA: Difference between revisions
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===Resolution=== | ===Resolution=== | ||
===Linewidth=== | ===Linewidth=== | ||
===Sidewall angle=== | |||
==AZ 5214E== | |||
===Resolution/yield=== | |||
===Linewidth/bias=== | |||
===Sidewall angle=== | |||
==AZ MiR 701== | |||
===Resolution/yield=== | |||
===Linewidth/bias=== | |||
===Sidewall angle=== | |||
==AZ nLOF 2020== | |||
===Resolution/yield=== | |||
===Linewidth/bias=== | |||
===Sidewall angle=== | ===Sidewall angle=== | ||