Specific Process Knowledge/Characterization/Optical microscope: Difference between revisions
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|cleanroom<br>D-3 | |cleanroom<br>D-3 | ||
|cleanroom<br>E-5 | |cleanroom<br>E-5 | ||
|cleanroom<br>F-1 | |cleanroom<br>F-1 | ||
|cleanroom<br>Cx1 | |cleanroom<br>Cx1 | ||
|cleanroom<br>F-3 | |cleanroom<br>F-3 | ||
|cleanroom<br>E-4 | |||
|- | |- | ||
|- | |- | ||
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:left;" | |-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:left;" | ||
!Responsible group | !Responsible<br>group | ||
|Wet chemistry | |Wet chemistry | ||
|Wet chemistry | |Wet chemistry | ||
|Wet chemistry | |Wet chemistry | ||
|Lithography | |||
|Lithography | |Lithography | ||
|Lithography | |Lithography | ||
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*20x | *20x | ||
*50x | *50x | ||
| | |||
*1.25x | |||
*5xBD | |||
*10xBD | |||
*20xBD | |||
*50xBD | |||
*100xBD | |||
|- | |- | ||
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|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:left;" | |-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:left;" | ||
!Ocular | !Ocular | ||
|10x | |||
|10x | |10x | ||
|10x | |10x | ||
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|- | |- | ||
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:left;" | |-style="background:LightGrey; color:black; vertical-align:middle; text-align:left;" | ||
!Special features | !Special<br>features | ||
|Stereoscopic | |Stereoscopic | ||
|IR imaging | |IR imaging | ||
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|- | |- | ||
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:left;" | |-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:left;" | ||
!Contrast mechanisms | !Contrast<br>mechanisms | ||
| | | | ||
*Brightfield | *Brightfield | ||
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*Brightfield | *Brightfield | ||
| | | | ||
*Brightfield | |||
*Darkfield | |||
| | |||
*Polarizer | |||
*Brightfield | *Brightfield | ||
*Darkfield | *Darkfield | ||
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|- | |- | ||
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:left;" | |-style="background:LightGrey; color:black; vertical-align:middle; text-align:left;" | ||
!Illumination modes | !Illumination<br>modes | ||
| | | | ||
*Episcopic | *Episcopic | ||
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| | | | ||
*Episcopic | *Episcopic | ||
| | |||
*Episcopic | |||
*Diascopic | |||
| | | | ||
*Episcopic | *Episcopic | ||
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| | | | ||
*DS-Fi2 | *DS-Fi2 | ||
*C-mount, 0.7x relay | *C-mount,<br>0.7x relay | ||
| | | | ||
*DS-Fi2 | *DS-Fi2 | ||
*C-mount, 0.7x relay | *C-mount,<br>0.7x relay | ||
|DS-Fi2 | |DS-Fi2 | ||
|None | |None | ||
|Infinity X | |Infinity X | ||
| | |||
*DP23-CU | |||
*C-mount | |||
|- | |- | ||
|- | |- | ||
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:left;" | |-style="background:LightGrey; color:black; vertical-align:middle; text-align:left;" | ||
!Analysis software | !Analysis<br>software | ||
|None | |None | ||
|None | |None | ||