Specific Process Knowledge/Lithography/Development/DUV developer: Difference between revisions

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	The development process will be performed by the customer together with the ~~Photolith~~ group of DTU Nanolab. In case you would like to do DUV lithography please contact Lithography team, who will consult you and run your wafers together with you.		The development process will be performed by the customer together with the Lithography group of DTU Nanolab. In case you would like to do DUV lithography please contact Lithography team, who will consult you and run your wafers together with you.

	Here you can find a [[media:250nm_ines_and_pillars_after_developing_i_60sec.pdf\| chart‎]] demonstrating a dependence between 250 nm line width/pillars diameter and exposure dose.		Here you can find a [[media:250nm_ines_and_pillars_after_developing_i_60sec.pdf\| chart‎]] demonstrating a dependence between 250 nm line width/pillars diameter and exposure dose.