Specific Process Knowledge/Lithography/Development/DUV developer: Difference between revisions
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*AZ 726 MIF (TMAH): 500 ml/min | *AZ 726 MIF (TMAH): 500 ml/min | ||
* | *Topside rinse DI water: 350 ml/min (with BSR+CR active) | ||
*Backside rinse DI water: 45 ml/min (with TSR+CR active) | *Backside rinse DI water: 45 ml/min (with TSR+CR active) | ||
*Process Nitrogen: 50 l/min | *Process Nitrogen: 50 l/min | ||