Specific Process Knowledge/Lithography/Development/DUV developer: Difference between revisions
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!style="background:silver; color:black;" width="60"|Media flow rates | |||
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*AZ 726 MIF (TMAH): 500 ml/min | |||
*Process DI water: 400 ml/min | |||
*Backside rinse DI water: 60 ml/min | |||
*Process Nitrogen: 50 l/min | |||
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