Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
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*i-line filter (365nm bandpass filter)<br>Intensity in Constant Intensity mode:<br>11mW/cm<sup>2</sup> @ 365nm | *i-line filter (365nm bandpass filter)<br>Intensity in Constant Intensity mode:<br>11mW/cm<sup>2</sup> @ 365nm | ||
*UV350 optics optional | *UV350 optics optional | ||
*UV250 optics | *(UV250 optics available) | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
365nm LED | 365nm LED | ||