Specific Process Knowledge/Lithography/Coaters/labspin04: Difference between revisions
Created page with "==Spin Coater: LabSpin 04== 400px|thumb|Spin coater: LabSpin 04 is located in PolyFabLab in building 347 Spin Coater: LabSpin 04 is a model LabSpin6 TT spin coater from SUSS. It's primary purpose is spin coating of SU-8 resist. It was installed in PolyFabLab in 2024. The user manual, user APV, and contact information can be found in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=547 LabManager] - '''requires login''' '''Tr..." |
|||
| Line 39: | Line 39: | ||
|style="background:LightGrey; color:black"|Spin speed | |style="background:LightGrey; color:black"|Spin speed | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
100 - 8000 rpm | |||
|- | |- | ||
|style="background:LightGrey; color:black"|Spin acceleration | |style="background:LightGrey; color:black"|Spin acceleration | ||
Revision as of 10:34, 3 November 2025
Spin Coater: LabSpin 04
Spin Coater: LabSpin 04 is a model LabSpin6 TT spin coater from SUSS. It's primary purpose is spin coating of SU-8 resist. It was installed in PolyFabLab in 2024.
The user manual, user APV, and contact information can be found in LabManager - requires login
Training video (same tool in Cleanroom 346): LabSpin02 + 03
Process information
Useful information about resist dispense can be found here.
| Purpose |
| |
|---|---|---|
| Resist |
| |
| Performance | Coating thickness |
Coating thickness range is dependent on specific resist formulation |
| Process parameters | Spin speed |
100 - 8000 rpm |
| Spin acceleration |
200 - 4000 rpm/s (wrongly labelled 1/s^2 in the software) | |
| Substrates | Substrate size |
|
| Allowed materials |
All PolyFabLab materials | |
| Batch |
1 |