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Specific Process Knowledge/Lithography/UVExposure: Difference between revisions

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'''BackSide Alignment:'''
'''BackSide Alignment:'''
*Minimum distance between BSA microscope objectives: 15 mm
*Minimum distance between BSA microscope objectives: 15 mm
**Alignment of smaller separations is possible using the "scan microscope" function
*Maximum distance between BSA microscope objectives: 100 mm
*Maximum distance between BSA microscope objectives: 100 mm
*BSA microscope travel range: X +50mm / -16mm; Y +50mm / -20mm (towards flat)
*BSA microscope travel range: X +50mm / -16mm; Y +50mm / -20mm (towards flat)
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