Specific Process Knowledge/Characterization/Optical characterization: Difference between revisions

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 !colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment
+|style="background:WhiteSmoke; color:black"|<b>Ellipsometer RC2</b>
 |style="background:WhiteSmoke; color:black"|<b>Ellipsometer VASE (M2000XI)</b>
 |style="background:WhiteSmoke; color:black"|<b>Ellipsometer M-2000V</b>
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 !style="background:silver; color:black;" align="center" width="60"|Purpose
 |style="background:LightGrey; color:black"|
+|style="background:WhiteSmoke; color:black"|
+*Measure thinfilm thicknesses and optical constants for single and multilayer optical transparent thinfilms.
+*Measure opticals constants for bulk material.
+*Measure thinfilm thicknesses and optical constants at elevated temperature <300C
 |style="background:WhiteSmoke; color:black"|
 *Measure thinfilm thicknesses and optical constants for single and multilayer optical transparent thinfilms.
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 !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Performance
 |style="background:LightGrey; color:black"|Films that can be examined
+|style="background:WhiteSmoke; color:black"|
+Any film that is transparent to the light in the given wavelength range
+e.g.:
+*Silicon Oxide
+*Silicon nitride
+*PolySilicon
+*Resists
+*Polymers
+*Very thin layers of metals
 |style="background:WhiteSmoke; color:black"|
 Any film that is transparent to the light in the given wavelength range
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 |style="background:LightGrey; color:black"|Film thickness range
 |style="background:WhiteSmoke; color:black"|
-*~20Å to 2 µm (depending of the material)
+*~20Å to a few micrometers (depending of the material)
 |style="background:WhiteSmoke; color:black"|
-*~20Å to 2 µm (depending of the material)
+*~20Å to a few micrometers (depending of the material)
+|style="background:WhiteSmoke; color:black"|
+*~20Å to a few micrometer (depending of the material)
 |-
 !style="background:silver; color:black" align="center" valign="center" rowspan="4"|Process parameter range
 |style="background:LightGrey; color:black"|Wavelength range
+|style="background:WhiteSmoke; color:black"|
+*210nm-1690nm
 |style="background:WhiteSmoke; color:black"|
 *210nm-1690nm
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 |-
 |style="background:LightGrey; color:black"|Incident angle range
+|style="background:WhiteSmoke; color:black"|
+*45-90 degrees
 |style="background:WhiteSmoke; color:black"|
 *45-90 degrees
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 |-
 |style="background:LightGrey; color:black"|Beam size
+|style="background:WhiteSmoke; color:black"|
+*3mm (spot size on sample depends on the angle)
 |style="background:WhiteSmoke; color:black"|
 *2mm (spot size on sample depends on the angle)
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 |style="background:LightGrey; color:black"|Mapping facility
 |style="background:WhiteSmoke; color:black"|
-*Can make wafermaps on up to 150mm wafers
+*Can make wafer maps on up to 150mm wafers
+|style="background:WhiteSmoke; color:black"|
+*Can make wafer maps on up to 150mm wafers
 |style="background:WhiteSmoke; color:black"|
 *No mapping facility
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 !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Accessories
 |style="background:LightGrey; color:black"|Focusing optics
+|style="background:WhiteSmoke; color:black"|
+*Focus lenses can be applied, reduces the beam diameter to 120µm
 |style="background:WhiteSmoke; color:black"|
 *Focus lenses can be applied, reduces the beam diameter to 125µm
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 *Extra stage for transmission measurements
 |style="background:WhiteSmoke; color:black"|
-*Base for ex-situ measurements, transmission data can be done by holding the sample up agains the detector
+*Extra stage for transmission measurements
+|style="background:WhiteSmoke; color:black"|
+*Base for ex-situ measurements, transmission data can be done by holding the sample up against the detector
 |-
 !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Substrates
 |style="background:LightGrey; color:black"|Batch size
+|style="background:WhiteSmoke; color:black"|
+*One sample at a time smaller than 150mm (ask if you have anything larger)
 |style="background:WhiteSmoke; color:black"|
 *One sample at a time smaller than 150mm (ask if you have anything larger)
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 *Any material that does not leave residuals on the stage and that does not evaporate
 |style="background:WhiteSmoke; color:black"|
-*Any material that may go into the Sputter system Lesker
+*Any material that does not leave residuals on the stage and that does not evaporate
+|style="background:WhiteSmoke; color:black"|
+*Any material that may go into the ALD2 (when mounted on that system)
 |-
 |}