Specific Process Knowledge/Thin film deposition/Temescal: Difference between revisions
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[[/Acceptance Test|'''Acceptance Test information is found here''']]. Describes '''thickness uniformity''', '''side wall deposition''', '''sheet resistance''', and '''use of the ion source'''. | [[/Acceptance Test|'''Acceptance Test information is found here''']]. Describes '''thickness uniformity''', '''side wall deposition''', '''sheet resistance''', and '''use of the ion source'''. | ||
===Materials | ===Materials=== | ||
[[Specific Process Knowledge/Thin film deposition/Deposition of Aluminium|Aluminium (Al)]]<br> | [[Specific Process Knowledge/Thin film deposition/Deposition of Aluminium|Aluminium (Al)]]<br> | ||