Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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This gives an infinite process parameter space.... | This gives an infinite process parameter space.... | ||
== The standard processes: Process A, B, C and | == The standard processes: Process A, B, C, D and SOI == | ||
=== How to read the SPTS notation on process recipes === | === How to read the SPTS notation on process recipes === | ||