Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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=== How to read the SPTS notation on process recipes === | === How to read the SPTS notation on process recipes === | ||
Two words about the SPTS short notation on process recipes: When, for instance, it is written Parameter X x1<sub>1</sub> >> x<sub>2</sub> (t<sub>1</sub>) x2 it is to be interpreted as | |||
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