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Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions

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=== How to read the SPTS notation on process recipes ===
=== How to read the SPTS notation on process recipes ===


 
{| border="2" cellpadding="2" cellspacing="1" style="text-align:center;"
 
{| border="2" cellpadding="2" cellspacing="1"  
|+ '''Process A'''
|+ '''Process A'''
|-
|-