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Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions

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Bureaucrats, danchip, Administrators
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Bureaucrats, danchip, Administrators
1,918 edits
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! colspan="2" align="center"| Step 2  
! colspan="2" align="center"| Step 2  
|-
|-
! width="250 | Parameter   
! width="150" | Parameter   
! width="250 | Etch
! width="150" | Etch
! width="250 | Dep
! width="150" | Dep
! width="250 | Etch
! width="150" | Etch
! width="250 | Dep
! width="150" | Dep
|-
|-
! Gas flow (sccm)  
! Gas flow (sccm)  
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