Specific Process Knowledge/Characterization/Tencor P17: Difference between revisions

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 == Process information ==
-*Info about [[Specific Process Knowledge/Characterization/Dektak XTA#Measurement Accuracy |measurement accuracy]] (''measured with Dektak XTA'')
+*Info about [[Specific Process Knowledge/Characterization/Stylus Profiler Measurement Uncertainty|measurement accuracy]]
 *Vendor's description of [https://labmanager.dtu.dk/view_binary.php?fileId=6385 instrument specs including reproducibility and flatness of scans] (''requires login as it seems not freely available from vendor's website'')
 *Using the analysis software: [[Specific Process Knowledge/Characterization/Tencor P17#Apex Software for Data Analysis|Apex software access & tips]]
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 |style="background:LightGrey; color:black"|Scan range X Y
 |style="background:WhiteSmoke; color:black"|
-Line scan X: 20 µm to 200 mm in a single scan. No stitching.
+*Line scan: 20 µm to 200 mm (no stitching)
+*Map scan: Any rectangle inscribed in a 200 mm circle
-Map scan XY: In principle any rectangle that can be inscribed in a 200 mm circle, but resolution is limited to max. 4 million points and scanning is slow. In practice to get good resolution scan a very small area (e.g., 100 x 500 µm)
+*Map resolution max. 4 million points and scanning is slow. To get good resolution scan a small area (e.g., 200 x 500 µm)
 |-
 |style="background:LightGrey; color:black"|Scan range Z
 |style="background:WhiteSmoke; color:black"|
-nm to 900 µm. It is possible to measure smaller steps but not recommended as the results may not be accurate.
+nm to 900 µm. (smaller measurements possible but inaccurate)
 |-
 |style="background:LightGrey; color:black"|Resolution X Y
 |style="background:WhiteSmoke; color:black"|
-Down to 0.025 µm in theory, but the tip radius is 2 µm, so the meaningful resolution is at the same order of magnitude
+*0.025 µm in theory
+*limited by tip shape and size
 |-
 |style="background:LightGrey; color:black"|Resolution Z
 |style="background:WhiteSmoke; color:black"|
-.01 Å, 0.08 Å, or 0.6 Å according to the manufacturer for ranges 13 µm, 131 µm, and 1 mm. Note the smallest of these values are purely theoretical as they are far below the lab's noise level.
+.01 Å, 0.08 Å, or 0.6 Å for ranges 13 µm, 131 µm, and 1 mm.
 |-
 |style="background:LightGrey; color:black"|Height accuracy z (95 % confidence)
 |style="background:WhiteSmoke; color:black"|
-~ 2 % for the smallest range for a 1 micron step and ~ 1 % for a 25 micron step '''for well-defined steps that are easy to measure''' (read about reducing and estimating the measurement uncertainty [[Specific Process Knowledge/Characterization/Dektak XTA#Measurement Accuracy |here]])
+*~ 2 % for a 1 µm step with the 13 µm range
+*~ 1 % for a 25 µm step
+*'''for well-defined steps that are easy to measure'''
+*[[Specific Process Knowledge/Characterization/Stylus Profiler Measurement Uncertainty|More info here]])
 |-
 |style="background:LightGrey; color:black"|Max scan depth as a function of trench width W
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 *2 µm 60<sup>o</sup> cone
 |-
-!style="background:silver; color:black" align="left" rowspan="5" valign="top" |Substrates
+!style="background:silver; color:black" align="left" rowspan="5" valign="top" |Substrates and film materials
 |style="background:LightGrey; color:black"|Substrate size
 |style="background:WhiteSmoke; color:black"|
 *Up to 8"
 |-
-| style="background:LightGrey; color:black"|Substrate materials allowed
+| style="background:LightGrey; color:black"|Materials allowed
 |style="background:WhiteSmoke; color:black"|
 *All materials that do not stick to the tip or leave residues on the chuck.