Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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# '''Multiplexing''': As described above, the multiplexed Bosch process may have the etch or passivation cycle each split into three separate phases: Delay, Boost and Main. | # '''Multiplexing''': As described above, the multiplexed Bosch process may have the etch or passivation cycle each split into three separate phases: Delay, Boost and Main. | ||
# '''Ramping''':Using the ramp option one can change process parameters linearly over the course of each processing step. | # '''Ramping''':Using the ramp option one can change process parameters linearly over the course of each processing step. | ||
# '''Process steps''': | # '''Process steps''': Stich any number of processing steps with different parameters to make one continuous process. | ||
This gives an infinite process parameter space.... | This gives an infinite process parameter space.... | ||