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| Thickness is measured in 5 points with a stylus profiler. <br> | | Thickness is measured in 5 points with a stylus profiler. <br> |
| Additionally we examine the newly deposited films for particles using the particle scanner (if available, otherwise we use the Jenatech microscope in darkfield mode) and we monitor the sheet resistance of the Ti/Au or Cr/Au films. | | Additionally we examine the newly deposited films for particles using the particle scanner (if available, otherwise we use the Jenatech microscope in darkfield mode) and we monitor the sheet resistance of the Ti/Au or Cr/Au films. |
| |}
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| {| border="1" cellspacing="2" cellpadding="2" colspan="3"
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| |bgcolor="#98FB98" |'''Quality control (QC) for Wordentec'''
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| |-
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| *[http://labmanager.dtu.dk/d4Show.php?id=3736&mach=167 QC procedure for Wordentec]<br>
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| *[https://labmanager.dtu.dk/view_binary.php?type=data&mach=167 The newest QC data for Wordentec]<br>
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| {| {{table}}
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| | align="center" |
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| {| border="1" cellspacing="1" cellpadding="2" align="center" style="width:300px"
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| ! QC Recipe:
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| ! Process 13
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| |-
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| |Deposition rate
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| |10 Å/s
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| |-
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| |Thickness
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| |10 nm / 90 nm
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| |-
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| |Pressure
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| |Below 4*10<sup>-6</sup> mbar
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| |-
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| |}
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| | align="center" valign="top"|
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| {| border="2" cellspacing="1" cellpadding="2" align="center" style="width:440px"
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| !QC limits
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| !Wordentec
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| |-
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| |Measured average thickness (Å)
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| |± 10 %
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| |-
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| |Lowest accepted deposition rate (Å/s)
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| |6 Å/s
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| |-
| |
| |}
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| |-
| |
| |}
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| Thickness is measured in 5 points with a stylus profiler.
| |
| |} | | |} |
