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!E-beam Lithography
!E-beam Lithography
|for getting access to [[Specific Process Knowledge/Lithography/EBeamLithography | E-beam Lithography Tools]]
|for getting access to [[Specific Process Knowledge/Lithography/EBeamLithography | E-beam Lithography Tools]]
|This online tutorial will be part of the E-beam TPT and is currently under prepration. <!-- ADDED WHEN TPT IS READY: It will include theory on electron beam lithography and equipment, as well as training in preparation of  exposure files and equipment operation.!--> The course is a prerequisite for hands-on training on the electron beam tool. Find more information about the training in the [[LabAdviser/Courses/TPT Ebeam|E-beam Tutorial]].
|This online tutorial will be part of the E-beam TPT and is currently under prepration. <!-- ADDED WHEN TPT IS READY: It will include theory on electron beam lithography and equipment, as well as training in preparation of  exposure files and equipment operation.!--> The course is a prerequisite for hands-on training on the electron beam tool. Find more information about the training in the [[LabAdviser/Courses/TPT Ebeam|E-beam Tutorial]].  
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