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https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Filmetrics
https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Filmetrics


== Dektak 3ST ==
info moved to
 
https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Dektak_3ST#Dektak_3ST
 
[[image:III-V profiler.JPG|300x300px|right|thumb|The profiler placed in 346-904 (Dektak 3ST).]]
 
The Dektak 3ST is intended for profile measurements on samples outside the cleanroom. It is located in the basement, building 346, room 904.
 
 
'''The user manual, technical information and contact information can be found in LabManager:'''
 
[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=184 Dektak 3ST (Dektak) in LabManager]
 
The computer connected to the Dektak 3ST is pretty old and runs Windows 98 SE. It is not connected to the network but traces can be saved on either USB memory stick or floppy disk. The USB driver is an old universal driver and has been shown to work with small size USB sticks. However it did not work with an 8GB Kingston stick.
 
===Equipment performance and process related parameters===
{| border="2" cellspacing="0" cellpadding="10"
|-
!style="background:silver; color:black" align="left" rowspan="4" valign="top" |Performance
|style="background:LightGrey; color:black"|Vertical Range
|style="background:WhiteSmoke; color:black"|
*65 kÅ, 655 kÅ, 1310 kÅ
|-
|style="background:LightGrey; color:black"|Scan length range
|style="background:WhiteSmoke; color:black"|
*50-50000 µm
|-
|style="background:LightGrey; color:black"|Stylus track force
|style="background:WhiteSmoke; color:black"|
*Recommended: 3-10 mg, depending on the softness of the surface
|-
|style="background:LightGrey; color:black"|Scan speed ranges
|style="background:WhiteSmoke; color:black"|
*High speed: 3s for 50µm to 50000µm
*Medium speed: 12s for 50µm to 10000µm
*Low speed: 50s
|-
!style="background:silver; color:black" align="left" rowspan="1" valign="top" |Materials
|style="background:LightGrey; color:black"|Allowed substrate materials
|style="background:WhiteSmoke; color:black"|
*III-V
* Silicon
* polymer
|}


== Stylus Profiler: Dektak150 ==
== Stylus Profiler: Dektak150 ==

Revision as of 19:39, 27 May 2025

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DektakXTA info copied to https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Dektak_XTA#Performance_and_Process_Parameters

P17 info copied to https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Tencor_P17#Tencor_P17_Stylus_Profiler

info moved to https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Sensofar_S_Neox

info moved to https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Filmetrics

info moved to https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Dektak_3ST#Dektak_3ST

Stylus Profiler: Dektak150

Stylus profiler:Dektak150, currently located in building 451, room 913 (as of 2023).

The stylus profiler Dektak150 is intended for profile measurements on samples outside the cleanroom. The Dektak150 is especially well suited for measuring soft samples as it can be adjusted to apply lower force than the other stylus profilers at Nanolab.


The user manual, technical information and contact information can be found in LabManager:

Stylus profiler:Dektak150 in LabManager

The computer is not connected to the network but data can be saved on a dedicated USB and transfered to a computer on the network.

Info about measurement accuracy can be found here.

Equipment performance and process related parameters

Purpose Profiler for measuring micro structures|
  • Single line profiles
  • Surface roughness on a line scan
Location Building 347, room 080
  • North-East corner of the building, in the basement
  • When you enter the building from the East, you enter directly into the basement.
Performance Scan range x y

Line scan x: 50 µm to 55 mm in a single scan

Scan range z

50 Å to 1 mm

Resolution x y

Theoretically down to 0.003 µm (in practice the resolution is limited by the tip size)

Resolution z

1Å (@65kÅ), 10Å (@655 kÅ), 80 Å (@5240 kÅ), 160 Å (@1mm)

Maximum sample thickness

100 mm

Hardware settings Tip radius
  • 5 µm 45o cone
  • 0.2 µm 45o cone on request
Substrates Substrate size
  • Up to 6"
Substrate materials allowed
  • In principle all materials
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