LabAdviser/Courses

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Tool Package Training (TPT)

For selected equipment groups, we create online introductory courses called Tool Package Training (TPT) that provide a comprehensive overview of both the theoretical principles behind the processes and the equipment used. These courses also include video demonstrations showcasing the operation of the equipment available in our cleanroom facilities. The completion of the respective TPTs are mandatory for all academic users before hands-on training on specific equipment can be requested. While we strongly recommend commercial users to take the online courses as well, only the video demonstrations showcasing the operation of the equipment are mandatory.

Course	Requirement	Description
Lithography TPT	for working with Lithography Equipment	This online course presents the theory on lithographic processes and equipment, as well as training in equipment operation in the cleanroom. The course is a prerequisite for hands-on training on all lithography equipment. Find more information on the Lithography TPT and sign up here.
Thin Film TPT	for getting access to Thin Film Deposition & Thermal Growth Equipment	This online course introduces the theory for thin film growth and deposition techniques available at DTU Nanolab. The course is a prerequisite for hands-on training on most of the thin film equipment in the cleanroom. Find more information on the Thin Film TPT and sign up here.
Dry Etch TPT	for getting access to Dry Etch Equipment	This online course presents the theory on dry etching and equipment, as well as training in equipment operation. The course is a prerequisite for hands-on training on any of the dry etching equipment in the cleanroom. Find more information on the Dry Etch TPT and sign up here
SEM TPT	for getting access to SEMs in 346 and 314/307	This online course presents the theory about scanning electron microscopy, as well as training in equipment operation. The course is a prerequisite for hands-on training on any of the SEMs in building 314/307, and 346 at DTU Nanolab. Find more information on the SEM TPT and sign up here.

Equipment Tutorials

For selected equipment, we have created online courses called exxplaining the operation (hardware and software) of our equipment. These tutorials are mandatory for all users before hands-on training on specific equipment can be requested via training@nanolab.dtu.dk.

Course	Requirement	Description
E-beam Lithography Tutorial	for getting access to E-beam Lithography Tools	This online tutorial will be part of the E-beam TPT and is currently under prepration. The course is a prerequisite for hands-on training on the electron beam tool. Find more information in the E-beam Tutorial.
Ellipsometer Tutorial	for getting access to the Ellipsometers	This online course consists of two short online tutorials Tutorial by Woollam Ellipsometer operation by DTU Nanolab
AFM Tutorial	for getting access to the AFM equipment	This online course consists of three short training videos regarding equipment operation. AFM Icon-PT Operation
Temescal Tutorial	for getting access to the E-beam Evaporators (Temescal) or (10-Pockets)	This online course consists of four short training videos regarding equipment operation. Temescal Operation

Links to Training Videos on Youtube

DTU Nanolab has a YouTube channel where we have gathered all our training videos.

We have a number of playlists and some single videos for equipment. You can get an overview here with links to the playlists/videos on You Tube

Safety and Behavior

• Nanolab introduction course: Safety in the Cleanroom
• Cleanroom safety at DTU Nanolab
• Working with chemicals in the cleanroom at DTU Nanolab
• Behaviour in the cleanroom at DTU Nanolab
• Playlist: Craftsmen in the cleanroom (Håndværkere i Renrummet)

Labmanager and Labadviser

• Playlist: DTU Nanolab systems (Labmanager and Labadviser)

Wet Chemistry

• Training in Fume Hoods: Part 1 - Intro and Getting Started
• Training in Fume Hoods: Part 2 - Working With Acids, Bases and Solvents
• Training in Fume Hoods: Part 3 – Wet benches and errors
• Using Quick Dump Rinse Baths
• Native Silicon Dioxide Removal

Lithography

• Playlist: Lithography TPT - Online Lecture
• Playlist: Lithography TPT - Equipment Operation (Spin Coater, Mask Aligner MA6-2, Automatic Puddle Developer)
• Playlist: Lithography TPT - Equipment Operation (Maskless Aligner)
• Introduction to E-beam lithography at DTU Nanolab
• Equipment Operation: JEOL 9500 EBL
• Equipment Operation: Manual Spin Coater: Labspin
• Equipment Operation: Manual Puddle Developer

Thin Film Deposition and Oxidation

• Equipment Operation (Playlist): E-beam Evaporator (Temescal)
• Equipment Operation: Lesker Dual Chamber Sputter System
• Equipment Operation: MVD (Antistiction Coating)
• Equipment Operation: Oxidation Furnaces

Dry Etch

• Playlist: Dry Etch TPT - Online Lecture
• Playlist: Dry Etch TPT - Equipment Operation

Characterization

• Playlist: Equipment Operation Zeiss Supra SEMs (in building 346)
• Playlist: Equipment Operation AFM Icon Nanoscope
• Equipment Operation Ellipsometer VASE
• Playlist: Equipment Operation XPS

Backend Tools

• Disco Dicing saw - blade exchange [1]