Specific Process Knowledge/Lithography/SU-8: Difference between revisions
Appearance
| Line 68: | Line 68: | ||
'''Spin curves:''' | '''Spin curves:''' | ||
Please notice that we do not have a spin curves for new formulations yet, but as soon as we have available data based on our experiments from cleanroom we will publish it. | |||
Spin curves for SU-8 2002 and SU-8 2005 (from the old KS Spinner): | Spin curves for SU-8 2002 and SU-8 2005 (from the old KS Spinner): | ||
[[File:SU8 spinCurves 2002 2005.png|640px|thumb|right|Spin curves for SU-8 2002 and SU-8 2005.]] | [[File:SU8 spinCurves 2002 2005.png|640px|thumb|right|Spin curves for SU-8 2002 and SU-8 2005.]] | ||