Jump to content

Specific Process Knowledge/Lithography/SU-8: Difference between revisions

← Older editNewer edit →
VisualWikitext
Elkh (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
343 edits
Elkh (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
343 edits
Line 3: Line 3:
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/SU-8 click here]'''
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/SU-8 click here]'''


[[Category: Lithography|Resist]]
[[index.php?title=Category:Lithography|Resist]]
[[Category: Resist|SU-8]]
[[index.php?title=Category:Resist|SU-8]]


__TOC__
__TOC__
Line 14: Line 14:


In the cleanroom the SU-8 2000 product line is widely used, where the '''SU-8 2005''', '''SU-8 2035''', and '''SU-8 2075''' are supplied by Nanolab.  
In the cleanroom the SU-8 2000 product line is widely used, where the '''SU-8 2005''', '''SU-8 2035''', and '''SU-8 2075''' are supplied by Nanolab.  
Considering discontinuation of the SU-8 2000 series we need to move to another product.
Considering discontinuation of the SU-8 2000 series we need to move to another product.
After we had a meeting with MicroResist and got some recommendation from them.
We can currently offer the following replacement materials by Kayaku Advanced Materials, USA (KAM):


Current Product Target Coat Thickness Recommended Product  
Kayaku Advanced Materials, USA (KAM)v has following recommendation:
SU-8 2010 or less ≤ 10 μm SU-8 3000 or SU-8 TF 6000 series  
 
SU-8 2010 through SU-8 2050 10 μm ≤ x ≤ 50 μm SU-8 3000 series  
Current Product Target Coat Thickness Recommended Product
 
SU-8 2010 or less ≤ 10 μm SU-8 3000 or SU-8 TF 6000 series
 
SU-8 2010 through SU-8 2050 10 μm ≤ x ≤ 50 μm SU-8 3000 series
 
SU-8 2075 or greater > 50 μm SU-8 XFT75 & SU-8 XFT100  
SU-8 2075 or greater > 50 μm SU-8 XFT75 & SU-8 XFT100  


After an internal conversation we have decided to try new followings products:
After an internal conversation we have decided to try new followings products:
SU8 3005 instead of SU8 2005
SU8 3005 instead of SU8 2005
SU8 3035 instead of SU8 2035
SU8 3035 instead of SU8 2035
SU8 XFT75 instead of SU8 2075
SU8 XFT75 instead of SU8 2075
And we will also try a new formulation SU8 3025.
And we will also try a new formulation SU8 3025.




Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Lithography/SU-8"