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Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 04 processing: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,518 edits
Line 57: Line 57:
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!AZ 1500
!AZ 1500
| 2024-12-17<br>FAT/SAT
| 2024<br>FAT/SAT
| 0.5 µm
| 0.5 µm
| Raster
| Raster
Line 69: Line 69:
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!AZ 5214E
!AZ 5214E
| 2024-12-18<br>during installation
| 2024<br>During installation
| 1.5 µm
| 1.5 µm
| Raster
| Raster
Line 113: Line 113:
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!AZ 1500
!AZ 1500
| 2024-12-17<br>FAT/SAT
| 2024<br>FAT/SAT
| 0.5 µm
| 0.5 µm
| Vector
| Vector
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