Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 04 processing: Difference between revisions
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'''Raster mode''' | '''Raster mode''' | ||
{|border="1" cellspacing="1" cellpadding="10" style="text-align:left;" | |||
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|-style="background:silver; color:black" | |||
| | |||
!Date | |||
!Thickness | |||
!Exposure mode | |||
!Dose | |||
!Defoc | |||
!Resolution | |||
!Comments | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
!AZ 1500 | |||
| 2024-12-17<br>FAT/SAT | |||
| 0.5 µm | |||
| Raster | |||
| 80 mJ/cm<sup>2</sup> | |||
| 10 (optical) | |||
| 1 µm | |||
| 4" mask plate with Cr<br>Development: 60s in 1:4 AZ 351B | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
!AZ 5214E | |||
| 2024-12-18<br>during installation | |||
| 1.5 µm | |||
| Raster | |||
| 85 mJ/cm<sup>2</sup> | |||
| 15 (optical) | |||
| >1 µm | |||
| 4" Si wafer<br>Development: 60s in 1:4 AZ 351B | |||
|- | |||
|- | |||
|-style="background:whitesmoke; color:black" | |||
!SU8 2035 | |||
| 2025-??-??</span><br>elkh? | |||
| 15 µm | |||
| Raster | |||
| ? mJ/cm<sup>2</sup> | |||
| ? (?) | |||
| ? µm | |||
| 4" Si wafer<br>Development: | |||
|- | |||
|} | |||
<br> | |||
'''Vector mode''' | '''Vector mode''' | ||
{|border="1" cellspacing="1" cellpadding="10" style="text-align:left;" | |||
|- | |||
|- | |||
|-style="background:silver; color:black" | |||
| | |||
!Date | |||
!Thickness | |||
!Exposure mode | |||
!Dose | |||
!Defoc | |||
!Resolution | |||
!Comments | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
!AZ 1500 | |||
| 2024-12-17<br>FAT/SAT | |||
| 0.5 µm | |||
| Vector | |||
| | |||
Pen: 1µm<br> | |||
Transmission: 100%<br> | |||
Laser Power: 120 mW<br> | |||
Velocity: 17 mm/s<br> | |||
| 30 (optical) | |||
| 1 µm | |||
| 4" mask plate with Cr<br>Development: 60s in 1:4 AZ 351B | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
!AZ 5214E | |||
| 2025-??-??<br>taran? | |||
| 1.5 µm | |||
| Vector | |||
| | |||
Pen: 1µm<br> | |||
Transmission: 100%<br> | |||
Laser Power: 120? mW<br> | |||
Velocity: ?? mm/s<br> | |||
| 30? (optical) | |||
| ? µm | |||
| 4" Si wafer<br>Development: 60s in 1:4 AZ 351B | |||
|- | |||
|} | |||
<br> | |||
==Writing speed== | ==Writing speed== | ||