Specific Process Knowledge/Lithography/Descum: Difference between revisions
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==Single wafer ashing rate | ==Single wafer descum ashing rate and uniformity== | ||
[[File:PA_descum_single_v3.png|400px|thumb|Ashing amount and ashing rate when processing a single 100 mm wafer.|right]] | [[File:PA_descum_single_v3.png|400px|thumb|Ashing amount and ashing rate when processing a single 100 mm wafer.|right]] | ||