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Specific Process Knowledge/Lithography/Descum: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
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Jehem (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
1,871 edits
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| style="text-align: left;" | Pre-descum film thickness range [nm]: || 11 || 12 || 10 || 11 || 9
| style="text-align: left;" | Pre-descum film thickness range [nm]: || 11 || 12 || 10 || 11 || 9
|-
|-
| style="text-align: left;" | Pre-dscum non-uniformity [%]: || 0.37 || 0.40 || 0.33 || 0.37 || 0.30
| style="text-align: left;" | Pre-descum non-uniformity [%]: || 0.37 || 0.40 || 0.33 || 0.37 || 0.30
|-
|-
| style="text-align: left;" | Post-descum film thickness range [nm]: || 10 || 10 || 12 || 19 || 33
| style="text-align: left;" | Post-descum film thickness range [nm]: || 10 || 10 || 12 || 19 || 33
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