Specific Process Knowledge/Lithography/Descum: Difference between revisions
| Line 186: | Line 186: | ||
! style="text-align: left;" | Ashing time [min]: !! 1 !! 2 !! 5 !! 10 !! 15 | ! style="text-align: left;" | Ashing time [min]: !! 1 !! 2 !! 5 !! 10 !! 15 | ||
|- | |- | ||
| style="text-align: left;" | | | style="text-align: left;" | Pre-descum film thickness range [nm]: || 11 || 12 || 10 || 11 || 9 | ||
|- | |- | ||
| style="text-align: left;" | Pre-ashing non-uniformity [%]: || 0.37 || 0.40 || 0.33 || 0.37 || 0.30 | | style="text-align: left;" | Pre-ashing non-uniformity [%]: || 0.37 || 0.40 || 0.33 || 0.37 || 0.30 | ||
|- | |- | ||
| style="text-align: left;" | | | style="text-align: left;" | Post-descum film thickness range [nm]: || 10 || 10 || 12 || 19 || 33 | ||
|- | |- | ||
| style="text-align: left;" | Post-ashing non-uniformity [%]: || 0.33 || 0.33 || 0.41 || 0.66 || 1.18 | | style="text-align: left;" | Post-ashing non-uniformity [%]: || 0.33 || 0.33 || 0.41 || 0.66 || 1.18 | ||