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Specific Process Knowledge/Lithography/Descum: Difference between revisions

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VisualWikitext
Jehem (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
1,915 edits
Jehem (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
1,915 edits
Line 172: Line 172:


{| class="wikitable"
{| class="wikitable"
|+ Ashing amount and rate
|+ style="caption-side: top; text-align: left;" | Ashing amount and rate
|-
|-
! Ashing time [min]: !! 1 !! 2 !! 5 !! 10 !! 15
! Ashing time [min]: !! 1 !! 2 !! 5 !! 10 !! 15
Line 182: Line 182:


{| class="wikitable"
{| class="wikitable"
|+ Ashing non-uniformity
|+ style="caption-side: top; text-align: left;" | Ashing non-uniformity
|-
|-
! Ashing time [min]: !! 1 !! 2 !! 5 !! 10 !! 15
! Ashing time [min]: !! 1 !! 2 !! 5 !! 10 !! 15
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