Specific Process Knowledge/Lithography/Descum: Difference between revisions
| Line 158: | Line 158: | ||
{| class="wikitable" | {| class="wikitable" | ||
|- | |- | ||
! Ashing time [min] !! 1 !! 2 !! 5 !! 10 !! 15 | ! Ashing time [min]: !! 1 !! 2 !! 5 !! 10 !! 15 | ||
|- | |- | ||
| Ashing amount [nm] || 5.2 || 6.2 || 35.1 || 72.3 || 87.1 | | Ashing amount [nm]: || 5.2 || 6.2 || 35.1 || 72.3 || 87.1 | ||
|- | |- | ||
| Ashing rate [nm/min] || 5.2 || 3.1 || 7.0 || 7.2 || 5.8 | | Ashing rate [nm/min]: || 5.2 || 3.1 || 7.0 || 7.2 || 5.8 | ||
|- | |- | ||
| Film thickness range, before descum [nm] || 11 || 12 || 10 || 11 || 9 | | Film thickness range, before descum [nm]: || 11 || 12 || 10 || 11 || 9 | ||
|- | |- | ||
| Pre-ashing non-uniformity [%] || 0.37 || 0.40 || 0.33 || 0.37 || 0.30 | | Pre-ashing non-uniformity [%]: || 0.37 || 0.40 || 0.33 || 0.37 || 0.30 | ||
|- | |- | ||
| Film thickness range, after descum [nm] || 10 || 10 || 12 || 19 || 33 | | Film thickness range, after descum [nm]: || 10 || 10 || 12 || 19 || 33 | ||
|- | |- | ||
| Post-ashing non-uniformity [%] || 0.33 || 0.33 || 0.41 || 0.66 || 1.18 | | Post-ashing non-uniformity [%]: || 0.33 || 0.33 || 0.41 || 0.66 || 1.18 | ||
|} | |} | ||
| Line 179: | Line 179: | ||
{| class="wikitable" | {| class="wikitable" | ||
|- | |- | ||
! Ashing time [min] !! 1 !! 2 !! 5 !! 10 !! 15 | ! Ashing time [min]: !! 1 !! 2 !! 5 !! 10 !! 15 | ||
|- | |- | ||
| Ashing amount [nm] || 4.3 || 6.7 || 10.1 || 39.5 || 78.8 | | Ashing amount [nm]: || 4.3 || 6.7 || 10.1 || 39.5 || 78.8 | ||
|- | |- | ||
| Ashing rate [nm/min] || 4.3 || 3.4 || 2.0 || 4.0 || 5.3 | | Ashing rate [nm/min]: || 4.3 || 3.4 || 2.0 || 4.0 || 5.3 | ||
|- | |- | ||
| Film thickness range, before descum [nm] || 11 || 13 || 11 || 12 || 14 | | Film thickness range, before descum [nm]: || 11 || 13 || 11 || 12 || 14 | ||
|- | |- | ||
| Post-ashing non-uniformity [%] || 0.37 || 0.43 || 0.37 || 0.40 || 0.46 | | Post-ashing non-uniformity [%]: || 0.37 || 0.43 || 0.37 || 0.40 || 0.46 | ||
|- | |- | ||
| Film thickness range, after descum [nm] || 11 || 9 || 10 || 12 || 21 | | Film thickness range, after descum [nm]: || 11 || 9 || 10 || 12 || 21 | ||
|- | |- | ||
| Post-ashing non-uniformity [%] || 0.37 || 0.30 || 0.33 || 0.41 || 0.74 | | Post-ashing non-uniformity [%]: || 0.37 || 0.30 || 0.33 || 0.41 || 0.74 | ||
|} | |} | ||