Specific Process Knowledge/Pattern Design: Difference between revisions
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*[[Media:Gamma coater & developer chucks + hotplate pins.gds|Gamma coater & developer chucks + hotplate pins.gds]] Design file showing the size of the chucks and the position of the hotplate pins in the Gamma tools. | *[[Media:Gamma coater & developer chucks + hotplate pins.gds|Gamma coater & developer chucks + hotplate pins.gds]] Design file showing the size of the chucks and the position of the hotplate pins in the Gamma tools. | ||
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== Mask Ordering and Fabrication == | == Mask Ordering and Fabrication == | ||
Our standard mask supplier is [http://Compugraphics.com/ Compugraphics]. They can provide 5" and 7" masks on soda lime glass or quartz. Minimum feature size can be 0.8µm, 1µm or 1.5µm which is reflected in the price. Read a short guide on[[Media:Mask_Ordering_Guide.pdf| how to order photomasks from Compugraphics]] here. Templates for the mask specifications for 5" and 7" masks respectively can be seen [[mask_spec| here.]] | Our standard mask supplier is [http://Compugraphics.com/ Compugraphics]. They can provide 5" and 7" masks on soda lime glass or quartz. Minimum feature size can be 0.8µm, 1µm or 1.5µm which is reflected in the price. Read a short guide on[[Media:Mask_Ordering_Guide.pdf| how to order photomasks from Compugraphics]] here. Templates for the mask specifications for 5" and 7" masks respectively can be seen [[mask_spec| here.]] | ||
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*[[Media:Maskordering_in_Fusion.pdf| How to order and attach design files in DTU Fusion]] | *[[Media:Maskordering_in_Fusion.pdf| How to order and attach design files in DTU Fusion]] | ||
*[[mask_spec| Templates for 5" and 7" mask specifications]] | *[[mask_spec| Templates for 5" and 7" mask specifications]] | ||
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== | == QC masks (DTU Nanolab)== | ||
This section contains a description of some of the quality control designs. | This section contains a description of some of the quality control designs. | ||