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Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,569 edits
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| width="200"| [[file:Pegasus 2 operator.jpg |204px|frameless]]
| width="200"| [[file:Pegasus 2 operator.jpg |204px|frameless]]
| width="275"|[[file:Peg3and4 front 2.JPG |292px|frameless]]
| width="275"|[[file:Peg3and4 front 2.JPG |292px|frameless]]
|-
| align="center" | The DRIE-Pegasus 1 load lock and cassette loader in the DTU Nanolab cleanroom A-1. {{photo1}}
| align="center" | The DRIE-Pegasus 2 operator station and load lock in the DTU Nanolab cleanroom A-1. {{photo1}}
| align="center" | The DRIE-Pegasus3 and DRIE-Pegasus4 operator station and cassette loading stations. {{photo1}}
|-
|}
{|
|width="200"| [[file:DRIE-Pegasus.jpg |200px|frameless]]
| width="400"| [[file:Pegasus 2 operator.jpg |408px|frameless]]
| width="550"|[[file:Peg3and4 front 2.JPG |584px|frameless]]
|-  
|-  
| align="center" | The DRIE-Pegasus 1 load lock and cassette loader in the DTU Nanolab cleanroom A-1. {{photo1}}
| align="center" | The DRIE-Pegasus 1 load lock and cassette loader in the DTU Nanolab cleanroom A-1. {{photo1}}
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