Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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|width="100"| [[file:DRIE-Pegasus.jpg | | |width="100"| [[file:DRIE-Pegasus.jpg |100px|frameless]] | ||
| width="200"| [[file:Pegasus 2 operator.jpg | | | width="200"| [[file:Pegasus 2 operator.jpg |204px|frameless]] | ||
| width="275"|[[file:Peg3and4 front 2.JPG | | | width="275"|[[file:Peg3and4 front 2.JPG |292px|frameless]] | ||
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| align="center" | The DRIE-Pegasus 1 load lock and cassette loader in the DTU Nanolab cleanroom A-1. {{photo1}} | | align="center" | The DRIE-Pegasus 1 load lock and cassette loader in the DTU Nanolab cleanroom A-1. {{photo1}} | ||