Specific Process Knowledge/Thin film deposition/Furnace LPCVD TEOS: Difference between revisions

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 == Manual for the furnace computer to the A, B, C and E stack furnaces ==
-The A, B, C and E stack furnaces can be controlled either from a touch screen by each furnace or from a furnace computer. The user manual for the furnace computer can be found here:
+The A, B, C and E stack furnaces can be controlled either from a touch screen by each furnace or from a furnace computer.
+The user manual for the furnace computer can be found here:
 *[https://labmanager.dtu.dk/view_binary.php?class=MiscDocument&id=19&name=Furnace+computer+manual+April+2024.pdf  See LabManager (requires a login)]