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=Courses=
=Courses=


We are building up a number of courses to educate our users in using the cleanroom facility and the equipment inside along with training for our other facilities. Below you can see the courses that are presently running. The introduction Courses is mandatory for all users that need to use our facilities on their own. Then there is a number of TPT's (Tool Package Training Courses) that you need to attend depending on which kind of tool you need to use inside the facility.
We have made a number of courses to prepare our users for their work in our cleanroom facility and available equipment, as well as training for our other facilities. Below you find a list of available courses. The Safety Introduction Course is mandatory for all users that need to use our cleanroom facilities on their own. Then there is a number of TPT's (Tool Package Training Courses) that you need to attend depending on which kind of tool you want to use.


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{| border="1" cellspacing="1" cellpadding="3" style="text-align:left;"  
!style="background:Black; color:white" width="3%" align ="center"|Course
! style="background:Black; color:white" width="3%" align="center" |Course
!style="background:Black; color:white" width="5%" align ="center"|Mandatory...
! style="background:Black; color:white" width="5%" align="center" |Mandatory...
!style="background:Black; color:white" width="10%" align ="center"|Short Course Decription
! style="background:Black; color:white" width="10%" align="center" |Short Course Decription
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![https://www.nanolab.dtu.dk/use-nanolab/introduction-course Cleanroom introduction course]
!Safety Introduction Course
|for working inside the cleanroom
|for working inside the cleanroom
|See the homepage
|Theoretical and practical safety training. All new cleanroom users must obtain DTU Nanolab’s introduction course certificate before access to the cleanroom is granted. Find more information and sign up [https://www.nanolab.dtu.dk/access/cleanroom-access/introduction-course here].
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![https://www.nanolab.dtu.dk/use-nanolab/other Other Nanolabs facilities introduction course]
!Safety Introduction Course for "Other Facilities"
|for working in other Nanolab facilities
|for working in other Nanolab facilities
|See the homepage
|DTU Nanolab offers a range of open access laboratories dedicated to both fabrication and characterization purposes. These facilities are situated in buildings 307, 346, and 347. Find more information and sign up [https://www.nanolab.dtu.dk/access/other-facilities here].
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![https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Lithography#Lithography_Tool_Package_Training Lithography TPT]
|- style="background:LightGrey; color:black" valign="center"
|for working with [[Specific_Process_Knowledge/Lithography|lithography]]
!Lithography TPT
|The course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom. The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.
|for working with [https://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Lithography Lithography Equipment]
|This online course presents the theory on lithographic processes and equipment, as well as training in equipment operation in the cleanroom. The course is a prerequisite for hands-on training on all lithography equipment. Find more information on the [https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Lithography#Lithography_Tool_Package_Training Lithography TPT] and sign up [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/lithography-tool-training here].  
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![[/Mask Design|Mask Design]]
|- style="background:WhiteSmoke; color:black" valign="center"
|no
!SEM TPT
|The course is recommended all users who intend to design their own masks for lithography.
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![[/TPT SEM|TPT SEM]]
|for getting access to SEMs at DTU Nanolab  
|for getting access to SEMs at DTU Nanolab  
|The course includes theory about SEM, as well as training in instrument operation. The course is for all users who intend to perform any kind of SEM related process and is a prerequisite for training in any of the SEM in building 314 and 346 at DTU Nanolab and for SEM in building 375.  
|This online course presents the theory about scanning electron microscopy, as well as training in equipment operation. It is also irregularly held as in-person lecture at DTU Nanolab. The course is a prerequisite for hands-on training on any of the SEMs in building 314 and 346 at DTU Nanolab and for the SEM in building 375 at DTU Offshore. Find more information on the [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/Courses/TPT_SEM SEM TPT] and sign up [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/scanning-electron-microscopy-sem here].  
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![[/TPT Dry Etch|TPT Dry Etch]]
|- style="background:LightGrey; color:black" valign="center"
|for getting access to dry etch equipment
!Dry Etch TPT
|The course includes theory on dry etching and equipment, as well as training in equipment operation in the cleanroom. The course is for all users who intend to perform any kind of dry etching in the cleanroom, and is a prerequisite for training in any of the dry etch equipment.
|for getting access to [https://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Etch Dry Etch Equipment]
|This online course presents the theory on dry etching and equipment, as well as training in equipment operation. The course is a prerequisite for hands-on training on any of the dry etching equipment in the cleanroom. Find more information on the [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/Courses/TPT_Dry_Etch Dry Etch TPT] and sign up [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/dry-etch-tool-training here]
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![[/TPT Thin Film|TPT Thin Film]]
|- style="background:WhiteSmoke; color:black" valign="center"
|for getting access to thin film deposition/growth equipment
!Thin Film TPT
|This is a theoretical course introducing the thin film growth and deposition techniques available at DTU Nanolab. The course consists of two lectures. Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures, before they apply for a training.  
|for getting access to [https://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Thin_film_deposition Thin Film Deposition & Thermal Growth Equipment]
|This online course introduces the theory for thin film growth and deposition techniques available at DTU Nanolab. The course is a prerequisite for hands-on training on most of the thin film equipment in the cleanroom. Find more information on the [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/Courses/TPT_Thin_Film Thin Film TPT] and sign up [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/thin-film-training here].  
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![https://kurser.dtu.dk/course/10868 Ph.d. course: 10868 Methods in micro and nano fabrication]
|- style="background:LightGrey; color:black" valign="center"
!Ph.d. course: 10868 - Methods in Micro and Nanofabrication
|for ph.d. students at Nanolab
|for ph.d. students at Nanolab
|This is a course aimed at PhD students new to work in the DTU Nanolab cleanroom. The objective is to accelerate research projects by providing a fast track learning towards hands-on cleanroom fabrication. To attend the course you MUST have a PhD project (or similar) that require you to work in the DTU Nanolab cleanroom. The course gives you a chance to present and discuss your project with some of your fellow PhD students and experienced process specialists from DTU Nanolab. The TPT courses are a main part of the course. The course gives you 5 ECTS points.
|This is a course aimed at PhD students new to work in the DTU Nanolab cleanroom. The objective is to accelerate research projects by providing a fast track learning towards hands-on cleanroom fabrication. To attend the course you MUST have a PhD project (or similar) that require you to work in the DTU Nanolab cleanroom. The course gives you a chance to present and discuss your project with some of your fellow PhD students and experienced process specialists from DTU Nanolab. The TPT courses are a main part of the course. The course gives you 5 ECTS points. Find more information and sign up [https://kurser.dtu.dk/course/10868 here]
 
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!M.Sc. course: 10851 - Introduction to Cleanroom-based Microfabrication
|for master students
|The overall aim of the course is to provide you with theoretical background and hands-on experience in the most common experimental techniques used for Silicon microfabrication. You will be introduced to microfabrication methods such as photolithography, etching, thin film deposition and characterization techniques such as scanning electron microscopy (SEM) and profilometry. During the course students will fabricate a working pressure sensor and characterize it in the DTU Nanolab cleanroom. This will enable you to design a fabrication process, draw a lithographic mask and work safely in the DTU Nanolab cleanroom. The TPT courses are a main part of the course. The course gives you 5 ECTS points. Find more information and sign up [https://kurser.dtu.dk/course/10851 here]
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